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Rapid Thermal Processing: Science and Technology Fair
Rapid Thermal Processing: Science and Technology
Fair
Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.
430 pages
| 介质类型 | 图书 Hardcover Book (精装硬皮书) |
| 已发行 | 1993年4月15日 |
| ISBN13 | 9780122476907 |
| 出版商 | Elsevier Science Publishing Co Inc |
| 页数 | 430 |
| 商品尺寸 | 152 × 229 × 25 mm · 725 g |
| 编辑 | Fair, Richard B. |
