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Interlayer Dielectrics for Semiconductor Technologies Shyam Muraka
Interlayer Dielectrics for Semiconductor Technologies
Shyam Muraka
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.
464 pages, Approx. 200 illustrations; Illustrations, unspecified
| 介质类型 | 图书 Hardcover Book (精装硬皮书) |
| 已发行 | 2003年12月30日 |
| ISBN13 | 9780125112215 |
| 出版商 | Elsevier Science Publishing Co Inc |
| 页数 | 464 |
| 商品尺寸 | 165 × 240 × 25 mm · 1,01 kg |
| 编辑 | Eizenberg, Moshe |
| 编辑 | Murarka, Shyam P |
| 编辑 | Sinha, Ashok K |
