Electron Beam Testing Technology - Microdevices - John T L Thong - 图书 - Springer Science+Business Media - 9780306443602 - 1993年7月31日
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Electron Beam Testing Technology - Microdevices 1993 edition

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Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing.


Marc Notes: Includes bibliographical references and index. Table of Contents: Background to Electron Beam Testing; W. C. Nixon. Introduction; J. T. L. Thong. Principles and Applications; J. T. L. Thong. Essential Electron Optics; A. R. Dinnis. Electron Beam Interaction with Specimen; K. Ura. Electron Spectrometers and Voltage Measurements; L. Dubbeldam. High Speed Techniques; J. T. L. Thong. Picosecond Photoemission Probing; H. Beha, R. Clauberg. Signal and Image Processing; F. M. Boland, E. R. Lynch. System Integration; M. Battu, et al. Practical Considerations in Electron Beam Testing; T. J. Aton. Industrial Case Studies; D. W. Ranasinghe, et al. Index."

介质类型 图书     Hardcover Book   (精装硬皮书)
已发行 1993年7月31日
ISBN13 9780306443602
出版商 Springer Science+Business Media
页数 462
商品尺寸 178 × 254 × 32 mm   ·   1,05 kg
编辑 Thong, John T.L.

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