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Beam Technologies for Integrated Processing National Research Council
Beam Technologies for Integrated Processing
National Research Council
Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
| 介质类型 | 图书 Paperback Book (平装胶订图书) |
| 已发行 | 1992 |
| ISBN13 | 9780309046350 |
| 出版商 | National Academies Press |
| 页数 | 106 |
| 商品尺寸 | 216 × 279 × 25 mm · 310 g |
| 语言 | 英语 |
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