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Computational Modeling in Semiconductor M. Meyyappan
Computational Modeling in Semiconductor
M. Meyyappan
Provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition and plasma processing, as well as defining the basic principles of transport phenomena.
390 pages, 120 illustrations
| 介质类型 | 图书 Hardcover Book (精装硬皮书) |
| 已发行 | 1995 |
| 原始发行日期 | 1994 |
| ISBN13 | 9780890067079 |
| 出版商 | Artech House |
| 页数 | 390 |
| 商品尺寸 | 159 × 229 × 25 mm · 657 g |
| 编辑 | Meyyappan, M. |
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