Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology - Marc J. Madou - 图书 - Taylor & Francis Inc - 9781420055115 - 2011年6月13日
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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology 第1 版本


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Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.


656 pages, 745 colour illustrations, 86 black & white tables

介质类型 图书     Hardcover Book   (精装硬皮书)
已发行 2011年6月13日
ISBN13 9781420055115
出版商 Taylor & Francis Inc
页数 656
商品尺寸 286 × 223 × 31 mm   ·   1,79 kg
语言 英语  

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