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Flash Lamp Annealing Rebohle 1st ed. 2019 edition
Flash Lamp Annealing
Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
288 pages, 10 Tables, color; XVIII, 288 p.
| 介质类型 | 图书 Book |
| 已发行 | 2019年8月6日 |
| ISBN13 | 9783030232986 |
| 出版商 | Springer Nature Switzerland AG |
| 页数 | 288 |
| 商品尺寸 | 150 × 220 × 20 mm · 607 g |
| 语言 | 德语 |
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