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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems Michael Huff 2020 edition
Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems
Michael Huff
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i
| 介质类型 | 图书 Hardcover Book (精装硬皮书) |
| 已发行 | 2020年4月10日 |
| ISBN13 | 9783030405588 |
| 出版商 | Springer Nature Switzerland AG |
| 页数 | 521 |
| 商品尺寸 | 150 × 220 × 20 mm · 934 g |
| 语言 | 德语 |
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