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Low Pressure Plasmas and Microstructuring Technology Gerhard Franz Softcover reprint of hardcover 1st ed. 2009 edition
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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, black & white illustrations
| 介质类型 | 图书 Paperback Book (平装胶订图书) |
| 已发行 | 2010年10月19日 |
| ISBN13 | 9783642099397 |
| 出版商 | Springer-Verlag Berlin and Heidelberg Gm |
| 页数 | 732 |
| 商品尺寸 | 155 × 235 × 38 mm · 1,04 kg |
| 语言 | 英语 |
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