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Materials & Process Integration for MEMS - Microsystems Francis E H Tay 2002 edition
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预计送达时间 年6月22日 - 年7月2日
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Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
299 pages, biography
| 介质类型 | 图书 Hardcover Book (精装硬皮书) |
| 已发行 | 2002年8月31日 |
| ISBN13 | 9781402071751 |
| 出版商 | Springer-Verlag New York Inc. |
| 页数 | 299 |
| 商品尺寸 | 155 × 235 × 19 mm · 712 g |
| 语言 | 英语 |
| 编辑 | Tay, Francis E. H. |
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